advanced surface metrology for micro nanofabrication

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Metrology and Standardization for Nanotechnology
Author : Elisabeth Mansfield
Publisher : John Wiley & Sons
Release Date : 2017-04-10
ISBN 10 : 3527340394
Pages : 626 pages
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For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology, and industrial innovation of nano-enabled products. First the field of nanometrology, nanomaterial standardization and nanomaterial innovation is introduced. Second, major concepts in analytical measurements are given in order to provide a basis for the reliable and reproducible characterization of nanomaterials. The role of standards organizations are presented and finally, an overview of risk management and the commercial impact of metrology and standardization for industrial innovations.

Nanotechnology Research Directions for Societal Needs in 2020
Author : Mihail C. Roco,Chad A. Mirkin,Mark C. Hersam
Publisher : Springer Science & Business Media
Release Date : 2011-06-17
ISBN 10 : 9400711689
Pages : 690 pages
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This volume presents a comprehensive perspective on the global scientific, technological, and societal impact of nanotechnology since 2000, and explores the opportunities and research directions in the next decade to 2020. The vision for the future of nanotechnology presented here draws on scientific insights from U.S. experts in the field, examinations of lessons learned, and international perspectives shared by participants from 35 countries in a series of high-level workshops organized by Mike Roco of the National Science Foundation (NSF), along with a team of American co-hosts that includes Chad Mirkin, Mark Hersam, Evelyn Hu, and several other eminent U.S. scientists. The study performed in support of the U.S. National Nanotechnology Initiative (NNI) aims to redefine the R&D goals for nanoscale science and engineering integration and to establish nanotechnology as a general-purpose technology in the next decade. It intends to provide decision makers in academia, industry, and government with a nanotechnology community perspective of productive and responsible paths forward for nanotechnology R&D.

Measurement Technology for Micro-Nanometer Devices
Author : Wendong Zhang,Xiujian Chou,Tielin Shi,Zongmin Ma,Haifei Bao,Jingdong Chen,Liguo Chen,Dachao Li,Chenyang Xue
Publisher : John Wiley & Sons
Release Date : 2017-01-17
ISBN 10 : 1118717961
Pages : 352 pages
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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Micromanufacturing Engineering and Technology
Author : Yi Qin
Publisher : William Andrew
Release Date : 2010-07-02
ISBN 10 : 9780815519805
Pages : 432 pages
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This book presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. • Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control • Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication • Outlines system engineering issues pertaining to handling, metrology, testing, integration & software • Explains widely used micro parts in bio / medical industry, information technology and automotive engineering. • Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging

Fundamental Principles of Engineering Nanometrology
Author : Richard Leach
Publisher : Elsevier
Release Date : 2014-05-17
ISBN 10 : 1455777501
Pages : 384 pages
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Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty Fully updated to cover the latest technological developments, standards, and regulations

Nanotechnology and Precision Engineering
Author : Zheng Yi Jiang,Yun Hae Kim
Publisher : Trans Tech Publications Ltd
Release Date : 2013-02-13
ISBN 10 : 3038260215
Pages : 1050 pages
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Selected, peer reviewed papers from the International Conference on Nanotechnology and Precision Engineering (ICNPE 2012), December 18-19, 2012, Guangzhou, China

Nanotechnology
Author : David J. Whitehouse,Shin Gijutsu Kaihatsu Jigyōdan (Japan). Exploratory Research for Advanced Technology
Publisher : Taylor & Francis
Release Date : 1991
ISBN 10 : 9780750301329
Pages : 71 pages
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Contributions from engineers, physicists, biologists, chemists and materials scientists are collected in this volume. The science of nanoscale engineering and manufacturing and the expanding range of applications of this science are discussed

Accuracy Enhancement Technologies for Micromachining Processes
Author : Golam Kibria,B. Bhattacharyya
Publisher : Springer Nature
Release Date : 2020-02-20
ISBN 10 : 9811521174
Pages : 214 pages
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This book bridges the gap between the demand for micro-featured components on the one hand, and successful micromachining of miniature products on the other. In addition to covering micromachining in the broader sense, it specifically addresses novel machining strategies implemented in various advanced micromachining processes to improve machining accuracy, energy consumption, component durability, and miniature-scale applicability. The book’s main goal is to present the capabilities of advanced micromachining processes in terms of miniature product manufacturing by highlighting various innovative machining strategies that can be used to augment the production scale and precision alike.

Precision Nanometrology
Author : Wei Gao
Publisher : Springer Science & Business Media
Release Date : 2010-06-14
ISBN 10 : 9781849962544
Pages : 354 pages
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Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.

Nanotechnology and Advanced Materials
Author : Guo Hui Yang
Publisher : Trans Tech Publications Ltd
Release Date : 2012-03-15
ISBN 10 : 3038138126
Pages : 554 pages
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Volume is indexed by Thomson Reuters CPCI-S (WoS). These are the proceedings of the International Conference on Nanotechnology Technology and Advanced Materials (ICNTAM 2012), held on 12-13th April 2012 in Hong Kong. They are divided into three sections. The first deals with Nanotechnology Technology. The second covers materials science and the third treats the use of manufacturing technology.

MEMS and Nanotechnology, Volume 4
Author : Tom Proulx
Publisher : Springer Science & Business Media
Release Date : 2011-05-21
ISBN 10 : 9781461402107
Pages : 192 pages
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MEMS and Nanotechnology, Volume 4 represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Mechanics of Biological Systems and Materials, Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials; Optical Measurements, Modeling and, Metrology; Experimental and Applied Mechanics, Thermomechanics and Infra-Red Imaging, and Engineering Applications of Residual Stress.

Microlithography and Metrology in Micromachining III
Author : Craig Friedrich,Akira Umeda
Publisher : SPIE-International Society for Optical Engineering
Release Date : 1997
ISBN 10 : 9780819426574
Pages : 134 pages
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Scanning Probe Microscopy: Characterization, Nanofabrication and Device Application of Functional Materials
Author : Paula M. Vilarinho,Yossi Rosenwaks,Angus Kingon
Publisher : Springer Science & Business Media
Release Date : 2006-03-30
ISBN 10 : 1402030193
Pages : 488 pages
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As the characteristic dimensions of electronic devices continue to shrink, the ability to characterize their electronic properties at the nanometer scale has come to be of outstanding importance. In this sense, Scanning Probe Microscopy (SPM) is becoming an indispensable tool, playing a key role in nanoscience and nanotechnology. SPM is opening new opportunities to measure semiconductor electronic properties with unprecedented spatial resolution. SPM is being successfully applied for nanoscale characterization of ferroelectric thin films. In the area of functional molecular materials it is being used as a probe to contact molecular structures in order to characterize their electrical properties, as a manipulator to assemble nanoparticles and nanotubes into simple devices, and as a tool to pattern molecular nanostructures. This book provides in-depth information on new and emerging applications of SPM to the field of materials science, namely in the areas of characterisation, device application and nanofabrication of functional materials. Starting with the general properties of functional materials the authors present an updated overview of the fundamentals of Scanning Probe Techniques and the application of SPM techniques to the characterization of specified functional materials such as piezoelectric and ferroelectric and to the fabrication of some nano electronic devices. Its uniqueness is in the combination of the fundamental nanoscale research with the progress in fabrication of realistic nanodevices. By bringing together the contribution of leading researchers from the materials science and SPM communities, relevant information is conveyed that allows researchers to learn more about the actual developments in SPM applied to functional materials. This book will contribute to the continuous education and development in the field of nanotechnology.

Handbook of Micro/Nano Tribology
Author : Bharat Bushan
Publisher : CRC Press
Release Date : 2020-10-28
ISBN 10 : 9781420050493
Pages : 880 pages
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This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution within this field, serving as a reference for the novice and the expert alike. Two parts divide this handbook: Part I covers basic studies, and Part II addresses design, construction, and applications to magnetic storage devices and MEMS. Discussions include: surface physics and methods for physically and chemically characterizing solid surfaces roughness characterization and static contact models using fractal analysis sliding at the interface and friction on an atomic scale scratching and wear as a result of sliding nanofabrication/nanomachining as well as nano/picoindentation lubricants for minimizing friction and wear surface forces and microrheology of thin liquid films measurement of nanomechanical properties of surfaces and thin films atomic-scale simulations of interfacial phenomena micro/nanotribology and micro/nanomechanics of magnetic storage devices This comprehensive book contains 16 chapters contributed by more than 20 international researchers. In each chapter, the presentation starts with macroconcepts and then lead to microconcepts. With more than 500 illustrations and 50 tables, Handbook of Micro/Nanotribology covers the range of relevant topics, including characterization of solid surfaces, measurement techniques and applications, and theoretical modeling of interfaces. What's New in the Second Edition? New chapters on: AFM instrumentation Surface forces and adhesion Design and construction of magnetic storage devices Microdynamical devices and systems Mechanical properties of materials in microstructure Micro/nanotribology and micro/nanomechanics of MEMS devices

IEEE, the Tenth Annual International Workshop on Micro Electro Mechanical Systems
Author : N.A
Publisher : Institute of Electrical & Electronics Engineers(IEEE)
Release Date : 1997
ISBN 10 : 9780780337442
Pages : 545 pages
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Advanced Development in Industry and Applied Mechanics
Author : Bale V. Reddy,Shishir Kumar Sahu,A. Kandasamy,Manuel de La Sen
Publisher : Trans Tech Publications Ltd
Release Date : 2014-09-12
ISBN 10 : 3038266132
Pages : 382 pages
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Collection of selected, peer reviewed papers from the 3rd International Conference on Advances in Mechanics Engineering (ICAME 2014), 28-29 July, Hong Kong, China. Volume is indexed by Thomson Reuters CPCI-S (WoS). The 72 papers are grouped as follows: Chapter 1: Advanced Materials Engineering and Processing Technologies, Chapter 2: General Mechanical Engineering and Applied Mechanics, Chapter 3: Applied Thermodynamics and Thermal Effects, Chapter 4: Instrumentation, Measurement Technologies, Monitoring and Detection, Analysis and Methodology, Chapter 5: Mechatronics, Robotics and Automation of Manufacturing, Chapter 6: Civil Engineering and Building Materials, Chapter 7: Product Design and Industrial Engineering

Micromanufacturing Processes
Author : V.K. Jain
Publisher : CRC Press
Release Date : 2016-04-19
ISBN 10 : 143985291X
Pages : 429 pages
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Increased demand for and developments in micromanufacturing have created a need for a resource that covers both the science and technology of this rapidly growing area. With contributions from eminent professors and researchers actively engaged in teaching, research, and development, Micromanufacturing Processes details the basic principles, tools,

Atomic Force Microscopy
Author : Peter Eaton,Paul West
Publisher : Oxford University Press
Release Date : 2010-03-25
ISBN 10 : 0199570450
Pages : 248 pages
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Atomic force microscopes are very important tools for the advancement of science and technology. This book provides an introduction to the microscopes so that scientists and engineers can learn both how to use them, and what they can do.

Research Centers Directory
Author : N.A
Publisher : N.A
Release Date : 2010
ISBN 10 :
Pages : 329 pages
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Research institutes, foundations, centers, bureaus, laboratories, experiment stations, and other similar nonprofit facilities, organizations, and activities in the United States and Canada. Entry gives identifying and descriptive information of staff and work. Institutional, research centers, and subject indexes. 5th ed., 5491 entries; 6th ed., 6268 entries.

Advanced Nondestructive Evaluation for Structural and Biological Health Monitoring
Author : N.A
Publisher : N.A
Release Date : 2001
ISBN 10 :
Pages : 329 pages
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