advanced surface metrology for micro nanofabrication

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Precision Nanometrology
Author : Wei Gao
Publisher : Springer Science & Business Media
Release Date : 2010-06-14
ISBN 10 : 9781849962544
Pages : 354 pages
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Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.

Metrology and Standardization for Nanotechnology
Author : Elisabeth Mansfield
Publisher : John Wiley & Sons
Release Date : 2017-04-10
ISBN 10 : 3527340394
Pages : 626 pages
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For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology, and industrial innovation of nano-enabled products. First the field of nanometrology, nanomaterial standardization and nanomaterial innovation is introduced. Second, major concepts in analytical measurements are given in order to provide a basis for the reliable and reproducible characterization of nanomaterials. The role of standards organizations are presented and finally, an overview of risk management and the commercial impact of metrology and standardization for industrial innovations.

Accuracy Enhancement Technologies for Micromachining Processes
Author : Golam Kibria,B. Bhattacharyya
Publisher : Springer Nature
Release Date : 2020-02-20
ISBN 10 : 9811521174
Pages : 214 pages
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This book bridges the gap between the demand for micro-featured components on the one hand, and successful micromachining of miniature products on the other. In addition to covering micromachining in the broader sense, it specifically addresses novel machining strategies implemented in various advanced micromachining processes to improve machining accuracy, energy consumption, component durability, and miniature-scale applicability. The book’s main goal is to present the capabilities of advanced micromachining processes in terms of miniature product manufacturing by highlighting various innovative machining strategies that can be used to augment the production scale and precision alike.

Nanotechnology Research Directions for Societal Needs in 2020
Author : Mihail C. Roco,Chad A. Mirkin,Mark C. Hersam
Publisher : Springer Science & Business Media
Release Date : 2011-06-17
ISBN 10 : 9400711689
Pages : 690 pages
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This volume presents a comprehensive perspective on the global scientific, technological, and societal impact of nanotechnology since 2000, and explores the opportunities and research directions in the next decade to 2020. The vision for the future of nanotechnology presented here draws on scientific insights from U.S. experts in the field, examinations of lessons learned, and international perspectives shared by participants from 35 countries in a series of high-level workshops organized by Mike Roco of the National Science Foundation (NSF), along with a team of American co-hosts that includes Chad Mirkin, Mark Hersam, Evelyn Hu, and several other eminent U.S. scientists. The study performed in support of the U.S. National Nanotechnology Initiative (NNI) aims to redefine the R&D goals for nanoscale science and engineering integration and to establish nanotechnology as a general-purpose technology in the next decade. It intends to provide decision makers in academia, industry, and government with a nanotechnology community perspective of productive and responsible paths forward for nanotechnology R&D.

Microlithography and Metrology in Micromachining III
Author : Craig Friedrich,Akira Umeda
Publisher : SPIE-International Society for Optical Engineering
Release Date : 1997
ISBN 10 : 9780819426574
Pages : 134 pages
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Micro and Nanomanufacturing
Author : Mark J. Jackson,Waqar Ahmed
Publisher : Springer
Release Date : 2017-10-28
ISBN 10 : 3319671324
Pages : 570 pages
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This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force microscopy for microbial cell surfaces, 3D printing of pharmaceuticals, microvascular coaptation methods, and more. The chapters also cover a wide variety of applications in areas such as surgery, auto components, living cell detection, dentistry, nanoparticles in medicine, and aerospace components. This is an ideal text for professionals working in the field, and for graduate students in micro and nanomanufacturing courses.

Nanotechnology
Author : David J. Whitehouse,Shin Gijutsu Kaihatsu Jigyōdan (Japan). Exploratory Research for Advanced Technology
Publisher : Taylor & Francis
Release Date : 1991
ISBN 10 : 9780750301329
Pages : 71 pages
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Contributions from engineers, physicists, biologists, chemists and materials scientists are collected in this volume. The science of nanoscale engineering and manufacturing and the expanding range of applications of this science are discussed

Measurement Technology for Micro-Nanometer Devices
Author : Wendong Zhang,Xiujian Chou,Tielin Shi,Zongmin Ma,Haifei Bao,Jingdong Chen,Liguo Chen,Dachao Li,Chenyang Xue
Publisher : John Wiley & Sons
Release Date : 2017-01-17
ISBN 10 : 1118717961
Pages : 352 pages
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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Micromanufacturing Engineering and Technology
Author : Yi Qin
Publisher : William Andrew
Release Date : 2010-07-02
ISBN 10 : 9780815519805
Pages : 432 pages
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This book presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. • Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control • Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication • Outlines system engineering issues pertaining to handling, metrology, testing, integration & software • Explains widely used micro parts in bio / medical industry, information technology and automotive engineering. • Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging

Introduction to Focused Ion Beam Nanometrology
Author : David C. Cox
Publisher : Morgan & Claypool Publishers
Release Date : 2015-10-01
ISBN 10 : 1681741482
Pages : 104 pages
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This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.

An Introduction to Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) and its Application to Materials Science
Author : Sarah Fearn
Publisher : Morgan & Claypool Publishers
Release Date : 2015-10-16
ISBN 10 : 1681740885
Pages : 66 pages
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This book highlights the application of Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) for high-resolution surface analysis and characterization of materials. While providing a brief overview of the principles of SIMS, it also provides examples of how dual-beam ToF-SIMS is used to investigate a range of materials systems and properties. Over the years, SIMS instrumentation has dramatically changed since the earliest secondary ion mass spectrometers were first developed. Instruments were once dedicated to either the depth profiling of materials using high-ion-beam currents to analyse near surface to bulk regions of materials (dynamic SIMS), or time-of-flight instruments that produced complex mass spectra of the very outer-most surface of samples, using very low-beam currents (static SIMS). Now, with the development of dual-beam instruments these two very distinct fields now overlap.

Micro and Nano Fabrication Technology
Author : Jiwang Yan
Publisher : Springer
Release Date : 2018-07-21
ISBN 10 : 9789811300974
Pages : 958 pages
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This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.